{
  "$type": "site.standard.document",
  "description": "A semiconductor post-process impact detection device includes a detection body that moves along a distribution line. A vibration detection unit is coupled to the detection body. The vibration detection unit detects vibration of the detection body. A rotation detection unit is coupled to the…",
  "path": "/patents/965024",
  "publishedAt": "2026-05-26T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "H10P72/0608",
    "SAMSUNG ELECTRONICS CO., LTD."
  ],
  "textContent": "A semiconductor post-process impact detection device includes a detection body that moves along a distribution line. A vibration detection unit is coupled to the detection body. The vibration detection unit detects vibration of the detection body. A rotation detection unit is coupled to the detection body. The rotation detection unit detects rotation of the detection body. An internal power supply is coupled to the detection body. A controller processes signals of the vibration detection unit and the rotation detection unit to determine information concerning the detection body. The controller transmits the information concerning the detection body to a data transmission unit. The data transmission unit transmits the information concerning the detection body provided from the controller to a data display unit. The data display unit displays the information concerning the detection body provided from the data transmission unit.",
  "title": "Semiconductor post-process impact detection device, semiconductor post-process transportation system including same, and impact location tracking method using same"
}