{
  "$type": "site.standard.document",
  "description": "A system includes an enclosure configured to couple to an equipment front end module (EFEM) of a substrate processing system, a charging assembly, and one or more support structures within the enclosure. The one or more support structures are configured to support a validation wafer in a charging…",
  "path": "/patents/1358018",
  "publishedAt": "2024-01-18T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "H02J7/00034",
    "Applied Materials, Inc."
  ],
  "textContent": "A system includes an enclosure configured to couple to an equipment front end module (EFEM) of a substrate processing system, a charging assembly, and one or more support structures within the enclosure. The one or more support structures are configured to support a validation wafer in a charging position to charge the validation wafer via the charging assembly.",
  "title": "ENCLOSURE SYSTEM WITH CHARGING ASSEMBLY"
}