{
  "$type": "site.standard.document",
  "description": "Disclosed is a MEMS device, comprising: a movable electrode plate; a first electrode plate and a third electrode plate on a first side of the movable electrode plate; a second electrode plate and a fourth electrode plate on a second side of the movable electrode plate. The first electrode plate…",
  "path": "/patents/1358274",
  "publishedAt": "2024-01-25T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/5712",
    "Zhunmao (Hangzhou) Technology Co."
  ],
  "textContent": "Disclosed is a MEMS device, comprising: a movable electrode plate; a first electrode plate and a third electrode plate on a first side of the movable electrode plate; a second electrode plate and a fourth electrode plate on a second side of the movable electrode plate. The first electrode plate, the second electrode plate, the third electrode plate and the fourth electrode plate respectively form a first capacitor, a second capacitor, a third capacitor, a fourth capacitor with the movable electrode plate, the first capacitor and the second capacitor are connected to a detection circuit, the third capacitor and the fourth capacitor are connected to a reference circuit, an output of the detection circuit and an output of the reference circuit are connected to an input of a divider for eliminating nonlinear relationship between the output voltage of the detection circuit and the displacement of the movable electrode plate.",
  "title": "MEMS DEVICE"
}