Magnetic sensor and method of manufacture thereof
DRIVE
December 17, 2014
A magnetic sensor (200 and a manufacturing method thereof are provided. The magnetic sensor (200) includes: a substrate (220) comprising a plurality of Hall elements (210), a protective layer (230) formed on the substrate (220), a base layer (240) formed on the protective layer (220), and an integrated magnetic concentrator (IMC, 250) formed on the base layer (240) and comprising a surface with an elevated portion. The base layer (240) has a larger cross-sectional area than the IMC (250).
Discussion in the ATmosphere