{
  "$type": "site.standard.document",
  "description": "In order to provide a thermal-type flowmeter highly accurate, with high reliability, and simple in construction, while being available at a lower price, a thermal-type flowmeter as proposed includes a sub-path that takes in a fluid under measurement; a sensor element that measures a flow-rate of…",
  "path": "/patents/968885",
  "publishedAt": "2014-10-15T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "F01N11/002",
    "HITACHI AUTOMOTIVE SYSTEMS LTD [JP]"
  ],
  "textContent": "In order to provide a thermal-type flowmeter highly accurate, with high reliability, and simple in construction, while being available at a lower price, a thermal-type flowmeter as proposed includes a sub-path that takes in a fluid under measurement; a sensor element that measures a flow-rate of the fluid under measurement in the sub-path; a temperature detection element that detects a temperature of the fluid under measurement; a drive circuit that controls a heating temperature of the sensor element; and a protection circuit that protects the drive circuit from noise, a cavity being formed on a substrate of the sensor element, an exothermic resistor being provided on a thin-film part on the cavity through the intermediary of an electrically insulating film, and a flow rate being detected on the basis of temperature distribution in the thin-film part.",
  "title": "THERMAL FLOW METER"
}