{
  "$type": "site.standard.document",
  "description": "Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode (107) out-of-plane from and proximate a first side of a first proof mass (102) between a first…",
  "path": "/patents/969345",
  "publishedAt": "2014-10-01T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/5614",
    "HONEYWELL INT INC [US]"
  ],
  "textContent": "Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode (107) out-of-plane from and proximate a first side of a first proof mass (102) between a first voltage and a second voltage at a first frequency. The method also includes oscillating a voltage on a second sense electrode (108) out-of-plane from and proximate a second side of the first proof mass (102) between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the voltage on the first sense electrode (107). The method also includes generating a rate signal corresponding to a rotation rate of the first proof mass (102) by first demodulating an out-of-plane signal from the first proof mass (102) at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass (102).",
  "title": "Method and system for operating a MEMS tuning fork gyroscope"
}