{
  "$type": "site.standard.document",
  "description": "Provided is a micro electro mechanical system (MEMS) resonating accelerometer. The MEMS resonating accelerometer according to the present invention comprises: a first inertial mass; a second inertial mass which is spaced at a predetermined distance from the first inertial mass on a first axis; an…",
  "path": "/patents/971758",
  "publishedAt": "2014-08-06T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/56",
    "MICROINFINITY INC [KR]"
  ],
  "textContent": "Provided is a micro electro mechanical system (MEMS) resonating accelerometer. The MEMS resonating accelerometer according to the present invention comprises: a first inertial mass; a second inertial mass which is spaced at a predetermined distance from the first inertial mass on a first axis; an elastic body which is provided between the first and second inertial masses so as to apply elasticity; and a tuning fork which is connected to the elastic body and measures the change of frequency according to acceleration, wherein the longitudinal direction of the tuning fork is parallel to a second axis which is perpendicular to the first axis, the elastic body has an opening portion being in a circular shape with a portion thereof removed, and one end of the tuning fork penetrates the opening portion and is connected to the inner surface of the elastic body.",
  "title": "MEMS RESONANT ACCELEROMETER"
}