OPERATOR DEVICE AND METHOD FOR OPERATING A CAPACITIVE SENSOR
DRIVE
May 16, 2024
An operator device for a capacitive sensor. The device includes an electronic device, by means of which an actual gap distance between the seismic mass and the at least one electrode and/or an actual variable for a sensitivity of the capacitive sensor can be determined, taking into account at least a first constant voltage, a first natural frequency of a first harmonic vibration of a seismic mass along a spatial direction, centrally intersecting the seismic mass and the at least one electrode, when the first constant voltage is applied between the seismic mass and the at least one electrode, a second constant voltage and a second natural frequency of a second harmonic vibration of the seismic mass along the spatial direction, centrally intersecting the seismic mass and the at least one electrode, when the second constant voltage is applied between the seismic mass and the at least one electrode.
Discussion in the ATmosphere