Nozzle and method of making same

Nozzle and a method of making the same are disclosed. The method includes the steps of: (a) providing a first material (115) that is capable of undergoing multiphoton reaction; (b) forming a first microstructured pattern (121) in the first material using a multiphoton process; (c) replicating the first microstructured pattern in a second material (130)that is different than the first material to make a first mold (140) that includes a second microstructured pattern (141) in the second material; (d) replicating the second microstructured pattern in a third material (150) different than the first and second materials to make a second mold (160) that includes a third microstructured pattern (161) that includes a plurality of microstructures in the third material; (e) planarizing the third microstructured pattern of the second mold with a layer of a fourth material (170) different than the third material, where the layer exposes tops of the microstructures in the plurality of microstructures in the third microstructured pattern; and (f) removing the third material resulting in a nozzle that includes a plurality of holes in the fourth material, where the holes correspond to the plurality of microstructures in the third microstructured pattern.