{
  "$type": "site.standard.document",
  "description": "A MEMS pressure sensor device (200, 400, 500, 600) is provided that can provide both a linear output with regard to external pressure, and a differential capacitance output so as to improve the signal amplitude level. These benefits are provided through use of a rotating proof mass (250, 420, 520)…",
  "path": "/patents/977695",
  "publishedAt": "2014-03-05T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "B60C23/0408",
    "FREESCALE SEMICONDUCTOR INC [US]"
  ],
  "textContent": "A MEMS pressure sensor device (200, 400, 500, 600) is provided that can provide both a linear output with regard to external pressure, and a differential capacitance output so as to improve the signal amplitude level. These benefits are provided through use of a rotating proof mass (250, 420, 520) that generates capacitive output (283, 293) from electrodes configured at both ends of the rotating proof mass. Sensor output can then be generated using a difference between the capacitances generated from the ends of the rotating proof mass. An additional benefit of such a configuration is that the differential capacitance output changes in a more linear fashion with respect to external pressure changes than does a capacitive output from traditional MEMS pressure sensors.",
  "title": "Pressure sensor with differential capacitive output"
}