MICROMECHANICAL COMPONENT FOR A ROTATION RATE SENSOR

DRIVE June 13, 2024
Source
A micromechanical component for a rotation rate sensor. The component includes a first rotor which has a first side with a first seismic mass and a second side with a second seismic mass; a first lever element, the first end of which is connected on the first side via a first lever-coupling spring to the first seismic mass and which extends from its first end to its second end on a third side of the first rotor situated between the first side and the second side; a second lever element, the first end of which is connected on the second side via a second lever-coupling spring to the second seismic mass and which extends from its first end to its second end on the third side of the first rotor; and a first lever-element spring via which the first lever element and the second lever element are connected together.

Discussion in the ATmosphere

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