Mems device automatic-gain control loop for mechanical amplitude drive

This document discusses, among other things, apparatus and methods for digital automatic gain control for driving a MEMS device, such as a proof mass. In an example, an apparatus can include a driver (107, 207, 307) configured to oscillate a proof mass of a MEMS device, a charge-to-voltage (C2V) (105, 205, 305) converter configured to provide oscillation information of the proof mass, an analog-to-digital converter (ADC) (312) configured to provide a digital representation of the oscillation information, and a digital, automatic gain control circuit to provide oscillation amplitude error information using a comparison of the oscillation information to target amplitude information, and to provide a digital drive command signal using an amplified representation of the oscillation amplitude error information.