{
  "$type": "site.standard.document",
  "description": "A resonator micro-electronic gyro, preferably a micro-electromechanical system (MEMS) gyro comprises a first and a second resonator mass (1, 2) suspended for rotational vibration. The two masses (1, 2) are flexibly connected by four mechanical coupling elements (4, 5, 6, 7) for anti-phase…",
  "path": "/patents/985309",
  "publishedAt": "2013-03-27T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/5712",
    "TRONICS MICROSYSTEMS S A [FR]"
  ],
  "textContent": "A resonator micro-electronic gyro, preferably a micro-electromechanical system (MEMS) gyro comprises a first and a second resonator mass (1, 2) suspended for rotational vibration. The two masses (1, 2) are flexibly connected by four mechanical coupling elements (4, 5, 6, 7) for anti-phase vibration. There is at least one positive and at least one negative sensing electrode (S11+, S11-, S21+, S21-) on each resonator mass (1, 2) for detecting an out-of-plane output movement of the masses (1, 2). A detection circuit is connected to be said positive and negative sensing electrodes and determines the output signal by differential detection of the signals on the basis of the following formula: Sx out = S �¢ 21 + - ¼ S �¢ 11 + - S �¢ 21 - - ¼ S �¢ 11 - , wherein {S21+}, {S21-} = sensing electrode signals of the positive and negative detection electrode of the second mass, respectively; {S11+}, {S11-} = sensing electrode signals of the positive and negative detection electrode of the first mass, respectively, µ = compensation factor.",
  "title": "A micro-electromechanical gyro device"
}