ANGULAR SPEED SENSOR AND COMPOSITE SENSOR FOR DETECTING ANGULAR SPEED AND ACCELERATION
DRIVE
December 26, 2012
A placing member (80) is configured to be supported from an outside by a terminal (81) electrically connected to a terminal electrode, and an X-axis-direction extended portion (84), a Y-axis-direction extended portion (82), and a Z-axis-direction extended portion (83) are provided in the terminal (81). This configuration provides an angular velocity sensor, in which a problem such that Y-axis-direction and Z-axis-direction vibrations applied from the outside cannot be damped is eliminated, and all the vibrations in three axis directions can be damped.
Discussion in the ATmosphere