{
  "$type": "site.standard.document",
  "description": "The gyrometer (G1) has an inertial mass (2) suspended above a substrate. The mass is provided with an excitation part and a detection part (8). A displacing device displaces the excitation part in a direction along a plane of the mass. A capacitive detector detects movement of the detection part…",
  "path": "/patents/996216",
  "publishedAt": "2012-11-07T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/5712",
    "COMMISSARIAT ENERGIE ATOMIQUE [FR]"
  ],
  "textContent": "The gyrometer (G1) has an inertial mass (2) suspended above a substrate. The mass is provided with an excitation part and a detection part (8). A displacing device displaces the excitation part in a direction along a plane of the mass. A capacitive detector detects movement of the detection part outside the plane of the mass. The detector has a suspended detection electrode (16) located facing towards the substrate so as to form a variable capacitor with the detection part. The electrode is placed above the detection part by a pillar (22) passing through the mass. Independent claims are also included for the following: (1) a rotation measurement system (2) a method for fabricating a gyrometer or measurement system.",
  "title": "Gyroscope with reduced parasitic capacitance"
}