SENSOR AND ELECTRONIC DEVICE

DRIVE June 4, 2026
Source
According to one embodiment, a sensor includes an element section and a circuit section. The element section includes a base including a base face, a fixed portion fixed to the base face, a movable portion supported by the fixed portion, a first gap being provided between the base face and the movable portion, and a plurality of fixed electrodes fixed to the base face and facing the movable portion. The plurality of fixed electrodes includes a first electrode and a second electrode. A first direction from the fixed portion to the first electrode is along a first plane along the base face. A second direction from the fixed portion to the second electrode is along the first plane and is inclined with respect to the first direction. The circuit section includes a first charge amplifier and a second charge amplifier.

Discussion in the ATmosphere

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