Inertial sensor

DRIVE September 12, 2012
Source
Disclosed herein is an inertial sensor including: a driving body displaceably supported on a flexible substrate part in a floating state; a displacement detection unit having a sensing electrode detecting displacement of the driving body; a vibrating part having a vibrating electrode vibrating the driving body; a differential amplifier connected to the sensing electrode and the vibrating electrode, and a circuit unit connected to the differential amplifier to calculate acceleration and angular velocity, wherein the acceleration is calculated by using the sensing electrode and the vibrating electrode.

Discussion in the ATmosphere

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