ANGULAR VELOCITY SENSOR

An angular velocity sensor includes a vibration body having a sensor electrode, a driving electrode, and a monitor electrode. The monitor electrode generates a signal according to vibration of the vibration body. The sensor circuit outputs a signal representing an angular velocity applied to the vibration body. The amplitude determination circuit measures amplitude of vibration of the vibration body. A PLL circuit includes a constant voltage source for generating a constant voltage, a timing switching unit for outputting a voltage by switching selectively between the constant voltage and a voltage corresponding to the monitor signal, and a voltage-controlled oscillator for outputting an oscillation signal having a frequency corresponding to the voltage output from the timing switching unit. When the amplitude measured by the amplitude determination circuit is smaller than a predetermined value, the timing switching unit outputs, to the voltage-controlled oscillator, the constant voltage output from the constant voltage source and outputs a start-up mode signal. This angular velocity sensor has a stable output characteristic.