Vibrating disk inertial rotary motion sensor
DRIVE
January 11, 2012
The microsensor has a central ring (130) kinematically connected to an outer ring (110) by a linkage that transmits Coriolis force partly to the central ring without transmitting oscillating movement around an excitation axis (Z). A detector measures Coriolis force transmitted to the ring. The detector comprises a piezoresistive gauge suspended between the ring and an anchoring part integrated with a fixed part of the microsensor. The gauge is connected to the ring at a height level, in the excitation axis, different from that of an oscillation axis (Y) of the ring.
Discussion in the ATmosphere