{
  "$type": "site.standard.document",
  "description": "Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.",
  "path": "/patents/1381779",
  "publishedAt": "2026-04-30T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/5621",
    "The Charles Stark Draper Laboratory, Inc."
  ],
  "textContent": "Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.",
  "title": "SILICON MEMS GYROSCOPES WITH UPPER AND LOWER SENSE PLATES"
}