{
  "$type": "site.standard.document",
  "description": "The amorphous carbon film of the present invention is an amorphous carbon film comprising carbon and hydrogen, wherein the amorphous carbon film contains not more than 30 atomic % (excluding 0 %) of hydrogen and, when the entire amount of the carbon is taken as 100 atomic %, carbon having an sp…",
  "path": "/patents/1009812",
  "publishedAt": "2011-08-31T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "C23C16/26",
    "TOYOTA CHUO KENKYUSHO KK [JP]"
  ],
  "textContent": "The amorphous carbon film of the present invention is an amorphous carbon film comprising carbon and hydrogen, wherein the amorphous carbon film contains not more than 30 atomic % (excluding 0 %) of hydrogen and, when the entire amount of the carbon is taken as 100 atomic %, carbon having an sp hybrid orbital is present in an amount of not less than 70 atomic % and less than 100 atomic %. Conductivity is imparted to an amorphous carbon film by controlling the contents of hydrogen, C3 and the like to increase a structure comprising CSp. This amorphous carbon film can be formed by plasma CVD using a reaction gas containing one or more gases selected from a carbocyclic compound gas containing carbon having an SP hybrid orbital, and a heterocyclic compound gas containing carbon having an sp hybrid orbital and silicon and/or nitrogen. By forming the amorphous carbon film on a surface of a substrate, a conductive member can be obtained.",
  "title": "CONDUCTIVE MEMBER PROVIDED WITH AMORPHOUS CARBON FILM AND FUEL CELL SEPARATOR"
}