PIEZOELECTRIC DEVICE AND ULTRASONIC DEVICE

DRIVE May 7, 2026
Source
A piezoelectric device includes: a substrate having a vibrating region and a non-vibrating region that surrounds the vibrating region; a first electrode provided across the vibrating region and the non-vibrating region; a second electrode disposed in the vibrating region to be separate from the first electrode; a piezoelectric body provided across the substrate, the first electrode, and the second electrode; and a third electrode that is disposed on the piezoelectric body and overlaps with at least the first electrode and the second electrode in the vibrating region when viewed in a thickness direction of the substrate.

Discussion in the ATmosphere

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