{
  "$type": "site.standard.document",
  "description": "The invention relates to a vibrating MEMS inertial angular sensor including a substrate for supporting at least two mass bodies mounted to bear mobile relative to the substrate and associated with at least one electrostatic actuator and at least one electrostatic detector. The sensor includes first…",
  "path": "/patents/1383107",
  "publishedAt": "2016-05-26T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/5747",
    "SAGEM DEFENSE SECURITE"
  ],
  "textContent": "The invention relates to a vibrating MEMS inertial angular sensor including a substrate for supporting at least two mass bodies mounted to bear mobile relative to the substrate and associated with at least one electrostatic actuator and at least one electrostatic detector. The sensor includes first means for suspending the mass bodies relative to the substrate and means for coupling the mass bodies together. The substrate is connected to a stationary rack by second suspension means.",
  "title": "MEMS Balanced Inertial Angular Sensor And Method For Balancing Such A Sensor"
}