Frequency Delta Sigma Modulation Signal Output Circuit, Physical Quantity Sensor Module, And Structure Monitoring Device

A frequency delta sigma modulation signal output circuit includes a phase modulation circuit that outputs a phase modulation signal based on a delay signal obtained by delaying a signal to be measured, in synchronization with the signal to be measured, and a frequency ratio digital conversion circuit that generates a frequency delta sigma modulation signal using a reference signal and the phase modulation signal.