{
  "$type": "site.standard.document",
  "description": "A method of manufacturing an external force detection sensor in which a sensor element is formed by through-hole (20) dry etching of an element substrate (3), and an electrically conductive material is used as an etching stop layer (18) during the dry etching.",
  "path": "/patents/1067509",
  "publishedAt": "2006-05-17T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "B81C1/00579",
    "MURATA MANUFACTURING CO [JP]"
  ],
  "textContent": "A method of manufacturing an external force detection sensor in which a sensor element is formed by through-hole (20) dry etching of an element substrate (3), and an electrically conductive material is used as an etching stop layer (18) during the dry etching.",
  "title": "Method of manufacturing an external force detection sensor"
}