ANGULAR VELOCITY AND METHOD OF MANUFACTURING THE SAME
DRIVE
April 26, 2006
Provided is an angular velocity sensor which is thin, requires no individual adjustment and can control the generation of signals that are unnecessary to the angular velocity sensor and are generated on the sensing electrodes when the tuning fork is made to vibrate in the X-axis direction, and a method for manufacturing the angular velocity sensor. Centers (8d) and (9d) of top electrodes (8c) and (9c) as components of detection units are shifted by W from centers (10) and (11) of main surfaces (3a) and (3b) of arms (1a) and (1b) of the tuning fork vibrator towards side surfaces (3c) and (3e) adjacent to main surfaces (3a) and(3b), respectively.
Discussion in the ATmosphere