Structures for supporting vibrators and devices for measuring physical quantities using such structures
DRIVE
March 15, 2006
It is provided a supporting structure having a substrate 12 and bonding wires 14A, 14B fixed onto the substrate 12 and connected to a vibrator 1. The substrate 12 has a pair of fixed portions 12a opposing each other and a pair of non-fixed portions 12b opposing each other. The fixed portions 12a and the non-fixed portions 12b together define a through hole 13A in the substrate 12. The vibrator 1 is supported with the bonding wire so that the vibrator 1 is not directly contacted with the substrate 12. The bonding wires 14A, 14B are fitted to the fixed portion 12a and is not fitted to any of the non-fixed portions 12b.
Discussion in the ATmosphere