Microgyroscope with frequency detection

DRIVE February 15, 2006
Source

The gyrometer has an excitation resonator (20) with seismic masses (12, 12) connected to each other by connecting arms (14, 14) and flexible units (16, 16). Excitation combs (18, 18) put the masses into movement in a direction (X) of a plane. A detection electrode (26) and an excitation electrode (28) excite a detection resonator (22), connected to the resonator (20), and measure the frequency of its natural mode. The excitation resonator (20) is capable of moving freely along the plane.

Discussion in the ATmosphere

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