{
  "$type": "site.standard.document",
  "description": "An inertial sensor includes a sensing portion (10) having a weight (12) supported by beams (13), the weight (12) being a movable portion, and a weight stopper (16) that limits a movable range of the weight (12), the weight stopper (16) being arranged in a vicinity of the weight (12) with a given…",
  "path": "/patents/1073525",
  "publishedAt": "2005-10-05T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "B81B3/0051",
    "FUJITSU MEDIA DEVICES LTD [JP]"
  ],
  "textContent": "An inertial sensor includes a sensing portion (10) having a weight (12) supported by beams (13), the weight (12) being a movable portion, and a weight stopper (16) that limits a movable range of the weight (12), the weight stopper (16) being arranged in a vicinity of the weight (12) with a given clearance and being a part of a substrate for the inertial sensor processed with MEMS techniques.",
  "title": "Inertial sensor"
}