{
  "$type": "site.standard.document",
  "description": "To provide a magnetic bearing device capable of reducing vibration by preventing a deterioration in the control of a rotor shaft due to a variation in the axial position of the rotor shaft, while performing positional control over the rotor shaft in a specific attitude with optimal magnetic force…",
  "path": "/patents/1073682",
  "publishedAt": "2005-09-28T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "B60Q9/008",
    "BOC EDWARDS JAPAN LTD [JP]"
  ],
  "textContent": "To provide a magnetic bearing device capable of reducing vibration by preventing a deterioration in the control of a rotor shaft due to a variation in the axial position of the rotor shaft, while performing positional control over the rotor shaft in a specific attitude with optimal magnetic force, and to a turbo molecular pump with the magnetic bearing device mounted thereto. A sensitivity storage section (281) stores therein a sensor sensitivity used in a sensor sensitivity adjustment. The sensitivity storage section (281) outputs the stored sensor sensitivity to a sensitivity switching section. The sensitivity switching section switches the sensor sensitivity according to the situation, and outputs the result to a sensor signal amplifier section. The sensor signal amplifier section (252) performs, to a sensor signal, the sensor sensitivity adjustment according to the sensor sensitivity stored in the sensitivity storage section (281), and outputs, to an A/D converter (154), a sensor output signal (153) having a sensor output voltage (V) after the sensor sensitivity adjustment.",
  "title": "Magnetic bearing device and turbo molecular pump with the magnetic bearing device mounted thereto"
}