Micro-machined vibrating gyroscope with in-plane detection

DRIVE March 16, 2005
Source
The vibrating gyrometer structure is manufactured on a thin plate by micro manufacture. The gyrometer has two mobile symmetric assemblies (30,10,50) coupled by a coupling structure (20) allowing mechanical energy transfer. There are three moving sections allowing vibration in different planes with fixed anchorage zones (34,36) and connection zone (12,14).

Discussion in the ATmosphere

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