A method for operating a resonator comprising an electrostatic actuation
DRIVE
August 11, 2004
The process involves exciting a vibrant device by combining control signals having an amplitude control signal, a rotation control signal around a gyroscopic axis and an amplitude modulated quadrature control signal. A vibration of the device is measured and the vibration is demodulated to a resonance frequency of the device. The rotational control signal is applied to a double frequency of the resonance frequency.
Discussion in the ATmosphere