A method for operating a resonator comprising an electrostatic actuation

DRIVE August 11, 2004
Source
The process involves exciting a vibrant device by combining control signals having an amplitude control signal, a rotation control signal around a gyroscopic axis and an amplitude modulated quadrature control signal. A vibration of the device is measured and the vibration is demodulated to a resonance frequency of the device. The rotational control signal is applied to a double frequency of the resonance frequency.

Discussion in the ATmosphere

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