{
"$type": "site.standard.document",
"description": "A rotational micro-electro-mechanical structure includes a stator (21), having a plurality of stator electrodes (33, 34), and a rotor (23), which is rotatable with respect to the stator (21) about an axis of relative rotation (A) and has a plurality of rotor electrodes (30), the stator electrodes…",
"path": "/patents/1085167",
"publishedAt": "2004-08-04T00:00:00.000Z",
"site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
"tags": [
"G01C19/5656",
"ST MICROELECTRONICS SRL [IT]"
],
"textContent": "A rotational micro-electro-mechanical structure includes a stator (21), having a plurality of stator electrodes (33, 34), and a rotor (23), which is rotatable with respect to the stator (21) about an axis of relative rotation (A) and has a plurality of rotor electrodes (30), the stator electrodes (33, 34) and the rotor electrodes (30) being comb-fingered; moreover, at least a first group (20a) of stator electrodes (33, 34) and rotor electrodes (30) are parallel to a first plane (P1) that includes the axis of relative rotation (A).",
"title": "Rotational micro-electromechanical (mems) structure with parallel electrodes"
}