{
  "$type": "site.standard.document",
  "description": "The sensor has tuning fork shaped substrate (1) on which monitoring units (150) detecting vibration produced by drive units (110), and displacement detectors (120) are provided. The detectors, drive and monitoring units include lower electrode layer, piezoelectric thin film and upper electrode…",
  "path": "/patents/1085660",
  "publishedAt": "2004-07-14T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "G01C19/5607",
    "MATSUSHITA ELECTRIC INDUSTRIAL CO LTD [JP]"
  ],
  "textContent": "The sensor has tuning fork shaped substrate (1) on which monitoring units (150) detecting vibration produced by drive units (110), and displacement detectors (120) are provided. The detectors, drive and monitoring units include lower electrode layer, piezoelectric thin film and upper electrode layer. The thin film's outer peripheral end has stepped flat portion on which upper electrode layer is not provided.",
  "title": "ANGULAR-VELOCITY SENSOR"
}