Method of manufacturing a fuel cell using chemical/mechanial planarization

A method of making a fuel cell (10) includes the following steps. A pattern (12) is placed on a base surface (14) to create a predetermined topography on the base surface (14). An anode layer (16), a cathode layer (18) and/or an electrolyte layer (20) is/are deposited over the pattern (12). Areas of higher topography (22) are removed from areas of lower topography (24) using chemical mechanical planarization to form a predetermined fuel cell structure (10).