{
  "$type": "site.standard.document",
  "description": "In a piezoelectric element 20 , a first electrode layer 2 made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal is formed on a silicon substrate 1 , and a piezoelectric layer 3 made of a rhombohedral or tetragonal…",
  "path": "/patents/1090744",
  "publishedAt": "2004-01-02T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "B41J2/14233",
    "MATSUSHITA ELECTRIC INDUSTRIAL CO LTD [JP]"
  ],
  "textContent": "In a piezoelectric element 20 , a first electrode layer 2 made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal is formed on a silicon substrate 1 , and a piezoelectric layer 3 made of a rhombohedral or tetragonal perovskite oxide (e.g., PZT) is formed on the first electrode layer 2 so that the piezoelectric layer 3 is preferentially oriented along the (001) plane.",
  "title": "Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus"
}