{
  "$type": "site.standard.document",
  "description": "A method for producing a multi-layer, micro-mechanical device. The device comprises an internal cavity having a micro-mechanical component therein. The method comprises the steps of forming the micro-mechanical component (8) from a layer of first material (7), providing a sealing layer (4,6) on at…",
  "path": "/patents/1096065",
  "publishedAt": "2003-05-14T00:00:00.000Z",
  "site": "at://did:plc:oql6ds5vnff4ugar6rruliwd/site.standard.publication/3mn3ohu7oxx5w",
  "tags": [
    "B81C1/00285",
    "SENSONOR ASA [NO]"
  ],
  "textContent": "A method for producing a multi-layer, micro-mechanical device. The device comprises an internal cavity having a micro-mechanical component therein. The method comprises the steps of forming the micro-mechanical component (8) from a layer of first material (7), providing a sealing layer (4,6) on at least one surface of the first material to define the cavity, providing a getter material (6) within the cavity, sealing the first material to the sealing layers by anodic bonding, supplying an inert gas to the cavity to regulate the pressure inside the cavity. A corresponding device produced by the method is also disclosed.",
  "title": "A micro-mechanical device and method for producing the same"
}