Tuning-fork type vibration gyro and electrode trimming method therefor
DRIVE
October 16, 2002
A tuning-fork type vibration gyro is able to suppress pyroelectric noise caused by temperature change and to obtain a sensor output having a high signal-to-noise ratio. The tuning-fork type vibration gyro includes a tuning-fork type vibration body (51) having two arms (52,53) mutually disposed in parallel and a base (54) for commonly supporting one end of each arm, wherein a longitudinal direction of the two arms (52, 53) is defined as a z-axis and a perpendicular direction thereto is defined as an x-axis; driving electrodes (62,64) respectively formed on the two arms (52,53) for generating vibration of the two arms in a direction parallel to the x-axis; detecting electrodes (72,75,76) respectively formed on the two arms for detecting electromotive force generated when the tuning-fork type vibration body (51) is rotated around the z-axis; and dummy electrodes (11) formed on the two arms in respective areas different from the driving electrodes (62,64) and the detecting electrodes (72,75,76).
Discussion in the ATmosphere