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  "path": "/nanotechnology-news3/newsid=69453.php",
  "publishedAt": "2026-05-22T22:10:11.000Z",
  "site": "https://www.nanowerk.com",
  "textContent": "Room-temperature e-beam method uses crystal buckling to pattern hard materials like silica for next-gen photonic and optoelectronic chips.",
  "title": "Stressed crystal creates nanoscale patterns on chip materials at room temperature"
}