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  "path": "/tech-industry/semiconductors/asml-lithograpy-roadmap-examined-from-duv-to-hyper-na",
  "publishedAt": "2026-05-01T11:30:00.000Z",
  "site": "https://www.tomshardware.com",
  "tags": [
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  "textContent": "ASML shipped 48 EUV lithography systems and 131 immersion DUV tools in 2025, generating €32.7 billion in total revenue and ending the year with a €38.8 billion order backlog.",
  "title": "ASML's roadmap for chipmaking lithography tools examined — from DUV to Low-NA, High-NA, Hyper-NA, and beyond"
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